Planar Sputtering Targets
DXAM planar sputter target portfolio includes a wide range of planar targets for large area deposition and other market applications:
Cast: Our portfolio includes Ag, In alloys, Li, Si, Zn alloys and other materials. Targets can be cast directly to a backing plate or bonded. Soleras also offers material-specific re-casting solutions.
HIP/Hot-pressed/Sintered: Soleras offers a range of targets made using powder-metallurgical and ceramic processing methods. These include, but are not limited to, Al2O3, AZO, Cr, ITO, Nb, SiO2, Ti and W and its alloys.
Rolled/Forged/Brazed: Soleras offers custom engineering and unique thermo-mechanical process solutions (e.g., grain-size control) for various materials, including Ag, Nb, NiCr, Ta and Zr.
Bonded: Soleras offers a broad portfolio of bonded targets in the planar form factor for large area deposition and other applications, providing targeted bonding solutions (e.g., custom solders and metallurgical bonding/brazing).
DXAM offers a full spectrum of planar sputtering targets. The most popular are listed below.
|Aluminum-doped Zinc Oxide||AZO|
|Indium Zinc Oxide||IZO|
|Indium Tin Oxide||ITO|